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Impact of feature-size dependent etching on the optical properties …

May 10th, 2008 by

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A. Berrier, R. Ferrini, A. Talneau, R. Houdre, and S. Anand Feature size dependence in Ar/Cl chemically assisted ion beam etching of InP-based photonic crystals (PhCs) and its influence on the optical properties of PhC devices operating …

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